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MICRO-USINAGE - IcoFlex Sàrl

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MICRO-USINAGE & FABRICATION


Technologies maitrisées

  • Micro-usinage par sablage (rainurage, cavités, perçages, découpes).
  • Scellement verre/verre ou verre/silicium (avec ou sans couche intermédiaire).
  • Dépôt de métaux par évaporation ou par électro-déposition.
  • Formulation de matériaux polymères (polymères photosensibles, adhésifs, colorants,...).

Caractéristiques d‘usinage

  • Profondeur d’usinage: épaisseur = 2 mm.
  • Taille de la structure = 100 µm.
  • Précision la structure liée au masque d’usinage: ± 5 µm.
  • Angle de gravure : 10 à 25° selon les matériaux.
  • Rugosité : Ra env. 1.1 µm dans le verre mais varie selon les matériaux.
  • Rapport d’aspect pour le verre : max. 1:1 pour structures < 200 µm et 2:1 pour des structures = à 200 µm.
  • Précision de gravure : 20 µm ou 10% de la profondeur si profondeur > à 200 µm.

Points forts de notre technologie d'usinage

  • Découpe de pièce de formes complexes
  • Gravure anisotropique (angle d’usinage d’environ 15° dans le verre).
  • Surfaces protégées, elles gardent leurs qualités initiales. Les capacités de scellement direct verre-verre et d’encapsulation sont préservées.
  • Pas de stress thermique ou mécanique induit.
  • Pas de bavures.
  • Faible coût.

Matériaux usinés

  • Céramique dure: Nitrure d’aluminium.
  • Céramique fragile: Piezocéramiques (PZT), céramiques poreuses, carbone.
  • Verre: Borofloat 33, Quartz, verres spéciaux (émail, infrasil,…).
  • Semi-conducteurs: Silicium, Arsénure de gallium (AsGa).
  • Matériaux naturels : Nacre, pierres semi-précieuses (onyx, lapis-lazuli,…)
  • Métaux: Précieux en couches fines et oxydes frittés (ferrite).
  • Plastiques: PMMA, Epoxy, PEEK.
Usinage d’un hiboux dans du verre

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